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conventional photolithography process Both electron-beam and ion-beam lithography produce high resolutions of 2-10 nm The process involves high current density electrons or ion beams that scan a pattern The fact that electron-beam or ion-beam lithography can operate only in vacuum increases the production cost; moreover, the process is relatively slow due to the use of narrow beams [16] In a nutshell, bulk micromachining is straightforward and involves well-documented fabrication processes It is less expensive and is suitable for simple geometry However, the material loss is high, and it is very much limited to a low-aspect ratio in the geometry



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Surface micromachining is the just opposite of the bulk micromachining technique In surface micromachining, materials are added layer by layer on top of the substrate The materials are usually deposited by chemical vapour deposition (CVD) in particular low pressure chemical vapour deposition (LPCVD) with the aid of a sacrificial layer [6] Sacrificial layers also known as spacer layers are layers of materials that are deposited between structural layers for mechanical separation and isolation The layer is later removed to allow mechanical devices to move relative to the substrate as illustrated in Figure 836 [2] The sacrificial material is usually made of phosphosilicate glass (PSG) or SiO2





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There are two fundamental aspects of power transmission. The rst and most obvious aspect is moving mechanical force to its destination. In some special cases, this is easy: you connect the output load directly to the power source. In many cases you need to compensate for misalignment of the load and the power source. In more dramatic cases you may need to carry the power around corners, or the load could be along a di erent axis of rotation than the source. In addition to moving power from one place to another, you may need to change its characteristics. Rotating force has torque and rotational velocity. Using di erent gearing schemes you can trade one for the other. Since motors are more e cient when they spin quickly, and most loads need power

Fig 836: Sacrificial or spacer layers [16]

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The process of surface micromachining begins with the deposition of the sacrificial layer onto the substrate by means of low pressure chemical vapour deposition (Figure 837) In the second step, a mask is produced to cover the surface of the sacrificial layer for subsequent etching to allow the attachment of the future cantilever beam A second mask is made to deposit polysilicon microstructural material The remaining sacrificial material is then etched away to produce the desired structure [6] Figure 838 shows the detailed view of a hinge on a micromirror produced by surface micromachining

instead of speed, you use some kind of gear train in almost all mechanical applications. By clever use of gears and other mechanisms, you can expand the behavior of your power transmission system. For example, di erential gearing allows you to apply power to two wheels that may need to rotate at di erent speeds. Other techniques let you apply power di erently depending on whether your power source is rotating in one direction or another. A mechanical transmission can eliminate the need for electronic control systems in some cases.

Fig 837: The surface micromachining procedure [16]

The surface micromachining process is typically slower than bulk micromachining The process is also often associated with problems related to the adhesion of layers, interfacial stresses and stiction The different layers which are bonded together may get delaminated if the surfaces contain excessive thermal and mechanical stress The mismatch of the coefficients of thermal expansion of the component materials may induce thermal stresses [6] In addition, residual stress and strain present

1. 2. 3. 4. 5. 6. 7. What do you use if your chain is getting too long or too droopy What can a chain be used for What can gears do What are split gears good for and why would you use them Name some of the gear types and describe how they are used. What do couplers do What kind of gear system can apply power to two wheels while, at the same time, letting those wheels turn at di erent speeds

Fig 838: A deployed micromirror with a view of the hinge [16]

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