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The standard U-joint, also called a Cardan joint after the Italian mathematician Geronimo Cardano, does have some drawbacks. At higher speeds of rotation it vibrates. If the two shafts are in a direct line, there is no problem. If there is an angle between them, and there will be because that s the whole point of this joint, the geometry of the joint describes a complex arc through space. This causes unwanted vibration at high speeds. A variation on the U-joint, called the constant velocity or CV joint, eliminates this source of vibration. CV joints are found where the rotation needs to be fast, and the simpler U-joints where rotation is slow.



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The thrust load is supported by an aerostatic thrust bearing while the radial load is supported by an aerostatic journal bearing Normally, the whole shaft is divided into two halves to be supported, one aerostatic bearing on each half The shaft will be integrated into the rotor to form an integral spindle Two rows of eight simple orifices are needed to support the required load capacity and stiffness One row may be sufficient if the load is light and the L/D ratio is small The pressure distribution for the single row and two rows feeding are shown in Figure 74 The half station feeding is also known as single row feeding The one-eighth feed station is not used because of its excessive airflow and less rigidity The one-fourth feed station supports the required load and stiffness with a suitable airflow Therefore, at the quarter station, two feed rows are chosen ahead of the half station or the one-eighth station





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MICROELECTROMECHANICAL SYSTEMS (MEMS)

Try This: The machine in Fig. 8-8 consists of two rectangular frames with three rotating joints. It s a simple machine that you can build in just a few minutes. Figure 8-9 shows the rst step. The gear inside the frame is a 24-tooth crown gear. This meshes with other gears at a right angle. This gear drives the wrist plate, which is the larger gear on the outside of the frame. In theory, more parts, perhaps making up a gripping hand, could be mounted on the wrist plate. We talk about angle-turning gears like the crown gear and bevel gears in the next chapter.

8

Fig. 8-8.

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This chapter gives a state-of-the-art review of many books and papers to help the readers understand the basics of the performance and application of microelectromechanical systems The authors considered in the review are 1 Michalicek, MA, Introduction to Microelectromechanical Systems, Air Force Research Laboratory, New Mexico, 2000 2 Hsu, TR, MEMS and Microsystems Design and Manufacture, McGraw Hill, 2002 3 MacDonald, NC, Microelectromechanical Systems (MEMS) Paradigms, Cornell University MEMS is the acronym for Micro Electro Mechanical Systems In Europe, MEMS are more commonly known as microsystems [1] MEMS can generally be defined as highly miniaturized devices or arrays of devices combining electrical and mechanical components, such as sensors, valves, actuators or complete systems, which are fabricated by using integrated circuit (IC) batch-processing techniques [2] Typically, MEMS contain components of sizes ranging from 1 micrometre ( m) to 1 millimetre (mm) For comparison purposes, Figure 81 shows a MEMS device (gear) alongside a human hair which is of a size of about 100 m [3] From the name itself, it can be understood that MEMS is able to achieve engineering functions through electromechanical means The current MEMS technology also incorporates thermal, magnetic, electrochemical, fluidic and optical devices Basically, the first effort to spur innovative miniature fabrication techniques for micromechanics was made by Richard Feynman in 1959 [4] However, his efforts failed to generate a fundamentally new fabrication technique In 1969, Westinghouse created the resonant gate Field-Effect Transistor (FET) based on new microelectronics fabrication techniques [2] Bulk-etched silicon wafers were used as pressure sensors in the 1970s, while the early experiments on surface-micromachined polysilicon were started in the 1980s The microelectronics industry enjoyed a great progress in the

Microelectro-mechanical Systems (MEMS) 1980s as micromachining became popular With this progress, simple actuators such as piezoresistive, capacitive, field emitters, electrostatic, bimorph and piezoelectric became common, and a large portion of the efforts was directed towards research on MEMS This resulted in fabrication methods employing ion etching, laser machining and deep ultraviolet systems with the use of better materials to produce advanced microelectromechanical systems

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