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Rating 4.4 With the rapid advancement of the epitaxial-layer pseudomorphic silicon germanium (SiGe) deposition processes, epitaxial-base SiGe HBTs have been integrated with mainstream advanced CMOS development processes, providing the advantages of SiGe technology for analog and RF circuitry while maintaining the full utilization of the advanced CMOS technology base for digital logic circuitry [23 44]. The advantages of forming an epitaxial layer SiGe HBT device in a standard CMOS process are as follows: Silicon germanium HBT devices naturally integrate with silicon semiconductor processing. SiGe HBT devices and circuits can be integrated with digital and analog CMOS on the same wafer reducing total cost. SiGe HBT devices and circuits integration with digital circuitry allow for high-level system integration and performance advantages. SiGe HBT devices can be developed in any CMOS foundry business. SiGe HBT devices can utilize mask levels from standard CMOS processing (e.g., substrate, n-wells, p-wells, shallow trench isolation [STI], polysilicon gate lms, silicide lms, contacts, vias, wiring and interlevel dielectric [ILD] lms). High-speed SiGe HBT can be migrated across different CMOS technology generations because of the independence of the SiGe HBT lm from the base CMOS technology. Epitaxial deposition of silicon germanium allows for optimization of a bipolar transistor without the limitations and pitfalls of implanted dopants. The SiGe alloy lm can achieve the following features: allow formation of atomically abrupt interface; avoid limitations of Gaussian pro les; avoid dopant-implant channeling; avoid hot-process de ciencies. The ultra-high vacuum chemical vapor deposition (UHV/CVD) allows for tight control of dopant implants and low thermal budget. Because it can be formed after STI, or even after the completion of CMOS transistors, it can be well controlled. best free pdf split and merge software: PDF Split and Merge Freeware - Download now | 7- PDF pdf splitter and merger software free download full version PDFsam: Split and merge PDF files. Free and open source
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