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The use of microsystems and MEMS devices for defence applications is well documented by the DARPA (Defense Advanced Research Projects Agency) [13] A few important examples are given by Michalicek as follows [2]:Inertial navigation on a chip for munition guidance and independent personal navigation Distributed unattended sensors for asset tracking, border control, environmental monitoring, security surveillance and process control Integrated fluidic systems for miniature analytic instruments, hydraulic and pneumatic systems, propellant and combustion control Weapon safing, arming and fuzing to replace current warhead and weapon systems to improve safety, reliability and long-term stability Embedded sensors and actuators for condition-based maintenance of machines and vehicles, on-demand amplified structural strength in lower-weight weapon systems and platforms and disaster-resistant buildings Mass data storage devices for storage densities of terabytes per square centimetre Integrated microoptomechanical components for identify-friend-or-foe (IFF) systems, displays and fibre-optics switches and modulators Active and conformable surfaces for distributed aerodynamic control of aircraft, adaptive optics systems, precision parts and material handling



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Applications of MEMS in the aerospace industry is not limited only to planes but to spacecrafts also For an airplane, MEMS are usually used in cockpit instruments, safety devices, wind tunnel instrumentation, sensors for fuel efficiency and safety, microgyroscopes for navigation and stability control and microsatellites [6] The applications of MEMS in space hardware can be seen in command and control systems, inertial guidance systems, attitude determination and control systems, power systems, propulsion systems, thermal control systems, communication and radar systems and space environment sensors [14] Mass flow control is commonly used in micromachined unmanned airborne vehicles (UAV) In this section, a microgyroscope is taken as an example as this has been mentioned a few times in the text Gyroscopes are devices to measure the angular velocity and are usually found in aircraft The MEMS vibrating mass gyroscopes are aimed at creating smaller and more sensitive devices There are four main types of microgyroscopes, namely, tuning fork gyroscopes, vibrating ring gyroscopes, macro laser ring gyroscopes GPDS insole and the piezoelectric plate gyroscopes The MEMS gyroscope requires a lower drive voltage with a good sensitivity and versatility as it can measure rotation in two directions [15] In addition to being used for conventional functions, MEMS gyroscopes are also used in conjunction with a programmable Functional Electrical Simulation (FES) to help people with a dropped-foot walking FSR Gyro FSR dysfunction (Figure 828) MEMS microcontroller gyroscopes are also used in military applications for Global Positioning Fig 828: A gail phase detection sensor for foot dysfunction [15] Devices and as an inertial measurement unit

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One of the most important MEMS devices in industrial applications is none other than the manufacturing process sensors These process pressure transmitters are consumed at a rate of about 200,000 units per year [6] In addition, some MEMS devices serve as sensors for hydraulic systems, paint spray, agricultural sprays, refrigeration systems, heating, ventilation and air conditioning systems, water level controls, digital micromirror devices, grating light valves, optical interconnects and telephone cable leaks In chemical applications, they are used as lab-on-a-chip and as microreactors

Try This: This project expands on the worm gear base from Fig. 9-19. First, build a simple arm with a locked gear at its base as shown in Fig. 9-20. Then you can build the worm gear base and attach the arm to it (Fig. 9-21). When you turn the long input shaft the arm raises and lowers. When you stop turning, the arm stops moving. Pushing or pulling on the arm demonstrates a little bit of backlash, but no back-driving. Having a joint that locks in place means that you don t have to use power to keep it there.

Microelectro-mechanical Systems (MEMS)

[4] Micromachined turbine engines, MEMS power generators and fuel cells are used in power generation

Fig. 9-20.

Application of MEMS and microsystems in consumer products can be seen in scuba diving watches and computers, bicycle components, fitness gear using hydraulics, washers with water-level controls, sport shoes with automatic cushioning control, digital tyre pressure gages, vacuum cleaners with automatic adjustment of brush beaters and smart toys [6] In computer data storage, there are shock sensors for hard disc drives and new data storage mechanisms [4] As consumer products become more and more sophisticated, MEMS devices will be relied upon even more, and it will not come as a surprise if almost every consumer product is incorporated with an MEMS device

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