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You may have noticed that there is a lot to learn if you want to understand robots especially if you hope to create your own robots. Each aspect of robot creation is an entire eld in itself: mechanics, electronics, control theory. Even the power drivers used to run motors have their own specialty. This chapter continues the electronics thread, adding one more piece to the puzzle. Resistance was a simple property that we explored in 5. Resistance is pretty much a xed attribute. Except for changes due to heating, resistors have the same e ect on a circuit under all conditions.



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Microelectro-mechanical Systems (MEMS)

in a bilayer structure result from the thermal oxidation process The stiction effect can deform a thin layer Once the sacrificial layer is removed by wet etching and is rinsed, the rinsing solution may form a water meniscus that results in capillary forces [16] Deep MEMS structures can also be produced by single-crystal silicon reactive etching and metallization (SCREAM) as shown in Figure 839 The anisotropic etch step removes the oxide only at the bottom of the trench which is extended through dry etching





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Some components, such as the diode, change their behavior depending on the direction in which the current is moving. These components have to be plugged in correctly to work correctly. Other components, such as capacitors, are more subtle. The e ect of a capacitor is di erent depending on how quickly the voltage in the circuit is changing. Before we can talk about capacitance, we need to discuss the di erent ways voltage appears in a circuit.

Fig 839: The SCREAM process [16]

In a nutshell, surface micromachining requires the building of layers of materials on the substrate It requires a complex masking design and the use of sacrificial layers This makes the process tedious and expensive Many problems associated with interfacial stress and stiction are present with surface micromachining However, surface micromachining is not constrained by the thickness of silicon wafers and is well suited for complex geometries

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So far, our electrons have owed as a current from one place to another, not unlike a river owing downstream. You might say it ows directly from one position in a circuit to another, making it direct current (DC). If you were to watch the voltage level at one point in a DC circuit, it might look like the 5-volt trace in Fig. 10-1. Simple DC has its place, but most circuits are going to involve changes in their current and voltage. The stereotypical changing current, or alternating current (AC), is the sine wave (Fig. 10-2). The sine is the most e cient waveform for power transmission. The electricity in your walls is in this shape.

LIGA which is the acronym for the German term Lithographie (lithography), Galvanoformung (electroforming) and Abformug (plastic moulding) [9] was first developed at the Karlsruhe Nuclear Research Center in Karlsruhe, Germany The LIGA process is very different from the various processes

Fig. 10-1.

discussed so far It offers great potential for non-silicon-based microstructures The technique provides well-defined, thick microstructures that have extremely flat and parallel surfaces These characteristics are particularly useful for fabricating motors, gear trains and generators that have spinning parallel parts which come in contact However, LIGA is only capable of producing parts that are permanently anchored to a substrate [9] Figure 840 shows the major fabrication steps in a LIGA process Referring to Figure 840, the process begins with deep X-ray lithography which sets the desired patterns on a thick film of resist The very thick resist layer of polymethylmethacrylate (PMMA) is deposited onto a primary substrate [16] As most masks are transparent to X-ray transmission, a thin film of gold is usually applied onto the mask The PMMA is then exposed to collimated X-rays and developed The deep X-ray lithography causes the exposed area to be dissolved Metal is then electrodeposited onto the primary substrate The PMMA layer is then stripped off to reveal a freestanding metal structure (Figure 840)

Fig 840: The LIGA process for making a square tube [6]

Fig. 10-2.

Microelectro-mechanical Systems (MEMS)

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