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One of the sprockets will be attached to power. This is the drive sprocket, and it is marked with a target in the sprocket schematic shown in Fig. 9-6. Where the drive sprocket pulls on the chain it will be tight. On the return path it has some slack and the chain will sag. You should adjust the chain length or the sprocket spacing to keep this slack small.

Microelectro-mechanical Systems (MEMS)



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From Figure 89, it can be seen that different aspects of natural science, such as electrochemistry, electrohydrodynamics, molecular biology, plasma physics, scaling laws, quantum physics and molecular physics, are related to the design and the manufacture of microsystems in one way or another In addition, mechanical engineering, electrical engineering, chemical engineering, materials engineering and industrial engineering principles are related to the design, manufacture and the packaging of microelectromechanical systems [6] Hsu s chart (Figure 89) [6] shows that scaling laws are obviously important MacDonald s analysis [8] is also discussed here There are generally two types of scaling laws that are applicable to the design of microsystems, namely, scaling of the geometry and scaling of the phenomenological

Fig. 1-2.

Fig 89: Various disciplines related to the design and the manufacture of microsystems as defined by Hsu, of

Arm with welding attachment (photo courtesy Motoman).

which scaling is very important [6]





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behaviour of microsystems The scaling of the geometry involves the laws of physics For parallel plate capacitor microactuators, the relationships include

Fig. 1-3.

Farray(x)

where a is the minimum feature size, b is the height of the plate and lp is the length of the plate The silicon surface area, As, and the area of each capacitor plate, Ap, are given as As = L2 s Ap = blp The maximum displacement is a, and the scales are as a 3 On the other hand, the relationships of the interdigitated-electrode capacitor microactuators are as follows The maximum displacement is lp, whereas the force scales are lpa2 Force increases by 26, that is, by 64 times

Cutting attachment (photo courtesy Motoman).

The electrostatic actuation is given in the following figure for two different configurations The structure resonant frequency or velocity of sound is given as nsound =

Fig 810: Electrostatic actuation of a charged parallel plate [8]

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Robots make some exploration jobs not only safer but possible. Most humans would not be able to walk into the mouth of an active volcano, perform hazardous-waste cleanup at the site of a nuclear accident, explore the surface of Mars for months on end, or crawl through the debris of a fallen building looking for survivors.

Microelectro-mechanical Systems (MEMS)

Though not robots, legends tell about the creation of arti cial life through many methods, most of which are poorly de ned How can we repeat the feats of the golem makers and the Greek deities who breathed life into clay Even the rst use of the word robot by Karel Capek was referring to a creature that was more biological than mechanical, a precursor to Mary Shelley s Frankenstein monster Real robots are mechanical and reproducible, machines that are built following clever and complex blueprints and driven by ingenious programs But even in the world of mechanical men, the vision of what a robot could be has always raced ahead of what we can actually build C3PO and R2D2 from Star Wars were the robots of my generation s dreams.

For example, silicon has a density of 2300 kg/m3 and a modulus of elasticity of 170 GPa The velocity of sound for silicon is approximately 8500 m/sec The spring and mass system for MEMS is also governed by Newton s second law and Hooke s law Figure 812 shows Newton s second law, whereas Figure 813 illustrates Hooke s law For a condition with no friction and no damping, the following relation is obtained: Fapp + Fsp = 0 & mx& = kx Fig 811: Electrostatic actuation [8]

Vke = Kinetic Energy = Energy stored in a magnetic field, Vm = Energy stored in an electric field, VE =

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