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MEMS are characterized by miniaturization, multiplicity and microelectronics Figure 83 shows the comparative sizes of MEMS devices The three characteristics of a MEMS device can be clearly seen from the example of the inertial sensors The conventional inertial sensor system is shown in Figure 84, whereas the comparison with micromachined system is shown in Table 81 Table 81 clearly indicates the superiority of a micromachined system in terms of size, cost and function The reduction in size tends to give many advantages A smaller system has a lower inertia of mass enabling the system to move more quickly Since the resonant vibration of a system is inversely proportional to the mass, microsystems are less prone to thermal distortion and vibration In addition, miniaturization allows for stable, more accurate and precision performance for application in the field of medicine, surgery, satellites, spacecraft engineering and telecommunication systems [6]



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If you give both pulleys the same rotation, so their top edges are moving in di erent directions, the wrist turns but does not tilt. Moving one pulley and holding the other still makes the wrist both turn and tilt. Di erent rates and directions of rotation in the two pulleys change the ratio of the turning and tilting motions.

Microelectro-mechanical Systems (MEMS)

Fig 83: Relative sizes of MEMS devices with the dimension in meters [4]

Now that you have had some experience with this type of three-gear system, the di erential gear in the next chapter may not seem so strange.

Figure 85 clearly shows the classification of the microtechnology of optical, electrical and mechanical systems Microtechnology is a miniaturized combination of optics, electronics and mechanics Other than microelectromechanical systems (MEMS), there also exists a branch known as Micro Opto Electro Mechanical Systems (MOEMS) [2]





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Try This: You should always feel free to be creative when you build your machines. Sometimes you can use things in unexpected ways. For example, a spring can be used as a multidirectional joint that has the added bene t of always snapping back to center (Fig. 8-12). See what kinds of joints you can build from ordinary things around the house. Keep your eyes open for creative ways to use existing materials in new and interesting ways.

6 dof Mo-Shapal Inertial Sensor, inside vacuum vessel, equipped with In-House Electronics mounted on 5 dof Micromanipulator

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3 McKeown, PA, High precision manufacturing in an advanced industrial economy, James Clayton Lecture, IMechE, 23rd April 1986 4 Fang, FZ and Venkatesh, VC, Diamond cutting of silicon with nanometric finish, Annals of the CIRP, 1998, Vol 47/1/, 45 49 5 Taniguchi, N, Current status in and future trends of ultra precision machining and ultra-fine processing, Annals of the CIRP, 1983, Vol 32, No 2, 573 582 6 Kalpakjian, S and Schmid, SR, Manufacturing Processes for Engineering Materials Prentice Hall, 1995 7 DeGarmo, EP, Black, JT and Kohsher, RA, Materials and Processes in Manufacturing, 6th ed, Macmillan Publishing Company, New York, 1964 8 Lindberg, RA, Processes and Materials of Manufacture, Allyn and Bacon Inc, USA, 1964 9 Konneh, M, An Experimental Investigation of Partial-Ductile Mode Grinding of Silicon PhD Thesis, Universiti Teknologi Malaysia, 2002 10 Mon, TT, Chemical-Mechanical Polishing of Optical Glass Subjected to Partial Ductile Grinding, Masters Thesis, Universiti Teknologi Malaysia, 2002 11 Izman, S, Machining of BK-7 Glass Subjected to Partial-Ductile Regime Grinding, PhD Thesis, Universiti Teknologi Malaysia, 2003 12 Venkatesh, VC, Precision manufacture of spherical and aspherical surfaces on plastics, glass, silicon and germanium, Current Science, Indian Academy of Sciences, 2003, Vol 84, No 9, 1211 1219 13 Venkatesh, VC and Tan, CP, The generation of aspheric surfaces on thermal imaging materials on a 4-axis CNC machining centre, Proceedings of ASPE Annual Meeting, Rochester, NY, 1990, 23 26 14 Horne, DF, Optical Reduction Technology Adam Hilger, Bristol, 2nd Ed, 1983 15 Kennedy, CW, Hoffman, EG and Bond, SD, Inspection and Gauging, 6th Ed, Industrial Press, USA, 1987 16 Venkatesh, VC, Inasaki, I, Toenshof, HK, Nakagawa, T and Marinescu, ID, Observations on polishing and ultra precision machining of semiconductor substrate materials, Annals of the CIRP, 1995, Vol 44/2/1995, 611 618 17 Bradley, IA, A History of Machine Tools, Model and Allied Publications Ltd, UK, 1972 18 Donaldson, RD, Patterson, S, Design and construction of a large vertical-axis diamond turning machine, SPIE s 27th Ann Int Tech Instrument Display, August 1983, 21 26 19 Bryan, JB, Design and construction of an ultra precision 84 inch diamond turning machine Precision Engineering, 1979, Vol 1, No 1, pp 13 17 20 Sagar, P, Temperature variations can crush accuracy, SME Magazine-Machine tool Basics, March 2001, 80 88 21 Cooling System Catalogue (in Japanese), BIG DAISHOWA, Vol 3, 148 22 Jackson, MJ, Microfabrication and Nanomanufacturing, Taylor and Francis, USA, 2006.

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