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MEMS are used in a variety of applications such as devices to deploy automobile airbags, video projection via a million individually steerable mirrors, microoptical systems for fibre-optic communications, super-fast electrophoresis systems for DNA separation, microrobots, microtweezers and neural probes Basically, the application of MEMS can be found in a few areas such as the automotive industry, aerospace industry, health-care industry, industrial products, consumer product industry and telecommunications industry Examples of MEMS devices or components produced in recent years include microgears, micromotors, microturbines and microoptical components Figure 818 shows a gear that is smaller than an ant s head with a pitch of the order of 100 m The micromotor shown in Figure 819 consists of a rotor, a stator and the torque transmission gear Both the microgear and micromotor are produced by the LIGA process which will be introduced later Microturbines such as the ones shown in Figure 820 are used to generate power The maximum rotational speed reaches 150,000



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Fig 818: A comparison of the size of a microgear Fig 819: A micromotor with a 700 m rotor [6, 10]

Try This: Normally, a box of gears is used to perform large power conversions. Figure 9-12 shows one such gear box. Note that there may be two gears on one shaft. The input is the tiny 8-tooth gear at the right of Fig. 9-12. This meshes with a 40-tooth gear, giving a 5 to 1 reduction in rotational speed and, ignoring losses due to friction, a 5 to 1 increase in torque. A 24-tooth gear on the same shaft meshes with another neighboring 40-tooth gear, for a 24:40 or 3:5 step. This pattern repeats once more, so the output shaft shows a speed reduction of: 40 : 8 40 : 24 40 : 24 5 : 1 5 : 3 5 : 3 125 : 9 9-1





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with that of an ant [4]

revolutions per minute with a lifetime up to 100 million rotations [5] In addition, microoptical components are used for high-speed signal transmission in the telecommunication industry Figure 821 shows an array of microlenses made from a transparent polymer for endoscopy applications

A 125:9 ratio requires 13.9 input revolutions for one output revolution. If you used a 40:8 ratio at each of the three steps, you would have a 125:1 nal ratio. That s a big reduction in speed and increase in torque. These same gears can be stretched out to carry torque from one place to another, as shown in Fig. 9-13. In this case, there is not much adjustment from the input to the output. Each step from a small gear to a large gear slows down the motion (and increases torque), but each step from a large gear back down to a small one does the reverse. This chain is then: 40 : 8 24 : 40 40 : 24 24 : 40 40 : 24 5 : 1 3 : 5 5 : 3 3 : 5 5 : 3 5:1 9-2

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having a 130 m diameter [6, 10] a match stick [6, 11]

Fig. 9-13.

Silicon pressure sensors developed by Lucas Novasensor, IC Sensors, Motorola Inc and Honeywell s Microswitch are used in process control, automotive, aerospace, medical and consumer product industries Work is underway in various research institutions to produce more MEMS devices for different applications For instance, universities in the United States are trying to develop air-driven microelectromechanical generators, atomic-force microscopes and microgrippers for application in micron-sized structures [9]

Automobiles present one of the largest commercial markets for MEMS devices Figure 822 shows the various MEMS devices that are used in a car MEMS and microsystems are used mainly to make automobiles safer and more comfortable for riders and to meet the high fuel efficiencies and low emission standard required by governments This has led to the birth of what is termed as smart vehicles that are based on the extensive use of sensors and actuators In addition, microsensors and actuators allow automobile manufacturers to make miniature autonomous robotic vehicles and electric cars (Figure 823) Microsystems and MEMS are applied in major areas such as safety gadgets, engine and power trains, comfort and convenience and vehicle diagnostics and health monitoring [6] The most popular safety example of MEMS in an automobile is the accelerator air-bag sensor which is commonly produced by surface micromachining (Figure 824) The sensor is used to determine exactly when the bag should be deployed to prevent injury to the driver or the passenger It is a

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Fig. 9-14.

Microelectro-mechanical Systems (MEMS)

Airbag side impact sensor Micromachined accelerometer for airbag Fuel pressure sensor Microphone for noise cancellation

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